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Analytical and numerical computations for high frequency MEMS

Pré-print du CMLA 2012-09 - version du 16 juillet 2012

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Auteurs : Laurent Desvillettes, Silvia Lorenzani

Abstract :

We consider a Micro-Electro-Mechanical Systems (MEMS) device vibrating at high frequency. We present (theoretical and numerical) computations allowing to assess the damping of the gas trapped in the channel of the device.

Semi-explicit solutions for the transient and permanent regimes associated to the linearized BGK equations with Maxwellian boundary conditions and a periodic forcing are established.

Then, different numerical methods are briefly described for the treatment of these equations.
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